Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Walt Wriggins"'
Publikováno v:
MRS Advances. 7:1441-1444
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::094b8921a4cbbff5e4af85cda8fa571b
https://doi.org/10.1557/s43580-022-00435-8
https://doi.org/10.1557/s43580-022-00435-8
Publikováno v:
2018 22nd International Conference on Ion Implantation Technology (IIT).
Wear effects are evaluated in spinning wheel wafer fixture components made from Al and Torlon materials exposed to high current ion beam exposures and over 350,000 wafer moves over extended time periods. Metrologies used include: (1) optical and SEM
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::10953f186bfcd32d766c3761e2e11eb4
https://doi.org/10.1109/iit.2018.8807899
https://doi.org/10.1109/iit.2018.8807899
Publikováno v:
2014 20th International Conference on Ion Implantation Technology (IIT).
Wafer/pad temperatures are measured for various elastomer materials for control of wafer temperatures during high-power implantation to less than 40 C. Wafer/pad temperatures during and directly following implant are monitored by in-situ IR sensors a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::94e734b5284c22ed9e514449d9190e7c
https://doi.org/10.1109/iit.2014.6939983
https://doi.org/10.1109/iit.2014.6939983