Zobrazeno 1 - 10
of 13
pro vyhledávání: '"Wakil Khan"'
Publikováno v:
Journal of the Vacuum Society of Japan. 59:222-235
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4a54b8b536bd73a5d16a3a1c4d65aa33
https://doi.org/10.3131/jvsj2.59.222
https://doi.org/10.3131/jvsj2.59.222
Publikováno v:
Journal of the Korean Physical Society. 64:362-365
Pumping systems with large vacuum chambers have numerous applications in the process industry: for example, mixing of various types of gases as in the semiconductor industry, the calibration of vacuum gauges, the measurement of outgassing rates of va
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::56ae578da82466c08498242419668b56
https://doi.org/10.3938/jkps.64.362
https://doi.org/10.3938/jkps.64.362
Autor:
S. S. Hong, Wakil Khan
Publikováno v:
Journal of the Vacuum Society of Japan. 58:69-71
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3272066383b4dd813bc6a338b2bd1e49
https://doi.org/10.3131/jvsj2.58.69
https://doi.org/10.3131/jvsj2.58.69
Publikováno v:
Measurement. 46:851-854
The measurement and control of gas flow are critical in many manufacturing processes. Semiconductor manufacturers, in particular, require a number of different process gases for etching, deposition, oxidation, doping and inerting applications. In man
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f907d9700cc4d255a8054f662fbcf351
https://doi.org/10.1016/j.measurement.2012.10.007
https://doi.org/10.1016/j.measurement.2012.10.007
Publikováno v:
Journal of the Korean Physical Society. 60:1671-1675
Gas flow and its measurement are vital in the process industry where most processes are carried out during dynamic gas flows. This work is concerned with flow analysis of various gases, including Ar, N2, and He, in the range from 1 Pa to 133 Pa for t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::98d4847eee2a4ce897fdfccf93b99626
https://doi.org/10.3938/jkps.60.1671
https://doi.org/10.3938/jkps.60.1671
Publikováno v:
Measurement. 44:2124-2128
This work is concerned with comparison of two low-pressure calibration systems at the Korea Research Institute of Standards and Science (KRISS). The ultrasonic interferometer manometer (UIM) which is a national primary standard and the dynamic flow c
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::96b03d4e3448470d0dc70375c2e1b274
https://doi.org/10.1016/j.measurement.2011.07.025
https://doi.org/10.1016/j.measurement.2011.07.025
Publikováno v:
Current Applied Physics. 10:538-543
The need to know the pressure in relatively large vacuum chambers arises at different measurements (calibration of vacuum gauges, outgassing measurements, etc.) and investigating the ways to minimize these pressure differences are of equal importance
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::04cafcbf36954c4c2c9cab2f1cd67f09
https://doi.org/10.1016/j.cap.2009.07.016
https://doi.org/10.1016/j.cap.2009.07.016
Publikováno v:
Journal of the Korean Vacuum Society. 18:403-410
Vacuum chambers have wide application for a variety of purposes such as material processing, vacuum gauge calibration, etc. As the dynamic pressure generated in such chamber is non-uniform, in many industrial as well as research processes, it is vita
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::dd39b5fb1981fa2e906a6e07f4c4ecfa
https://doi.org/10.5757/jkvs.2009.18.6.403
https://doi.org/10.5757/jkvs.2009.18.6.403
Publikováno v:
MAPAN. 24:89-94
Korea Research Institute of Standards and Science (KRISS) has assembled a new flow-control system (FCS-705) for the study of advanced applications and calibration of different types of vacuum gauges by comparison method. This report details the measu
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::57adb53327a4780a233d7f18c57394aa
https://doi.org/10.1007/s12647-009-0011-0
https://doi.org/10.1007/s12647-009-0011-0
Publikováno v:
Measurement. 45:2456-2458
Time constant is an important property of the continuous flow systems that can be used to estimate the dynamic equilibrium time for the reaction vacuum chamber of such systems. This work is concerned with measurements and analysis of time constant of
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9ed7cd9f01ea503fdb3cc0b52fb99f20
https://doi.org/10.1016/j.measurement.2011.10.049
https://doi.org/10.1016/j.measurement.2011.10.049