Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Wakasugi, Katsuhiko"'
Autor:
Wakasugi, Katsuhiko1 devicegrad@eecs.kumamoto-u.ac.jp, Wakimoto, Satoshi1, Akamichi, Takayuki1, Nakada, Akira1, Kubota, Hiroshi1, Inokuchi, Tsuneo2 Inokuchi@jp.sony.com, Suzuki, Shinji3 s.suzuki@ushio.co.jp, Aikawa, Sou4 aikawa@tecnos-net.co.jp, Kosaka, Kouji5 kosaka—kouji@technologies.co.jp, Nakamura, Kazumitsu6 nakamurak@kmt-ti.or.jp, Morimoto, Tatsuo7 morimoto@fff.niche.tohoku.ac.jp
Publikováno v:
IEEE Transactions on Semiconductor Manufacturing. Nov2005, Vol. 18 Issue 4, p487-494. 8p.
Autor:
Wakasugi, Katsuhiko, Tokunaga, Mie, Sumita, Taishi, Kubota, Hiroshi, Nagata, Masanori, Honda, Yukio
Publikováno v:
In Physica B: Physics of Condensed Matter 1997 239(1):29-31