Zobrazeno 1 - 10
of 1 086
pro vyhledávání: '"W. Vandervorst"'
Autor:
T. Nuytten, J. Bogdanowicz, L. Witters, G. Eneman, T. Hantschel, A. Schulze, P. Favia, H. Bender, I. De Wolf, W. Vandervorst
Publikováno v:
APL Materials, Vol 6, Iss 5, Pp 058501-058501-6 (2018)
The continued importance of strain engineering in semiconductor technology demands fast and reliable stress metrology that is non-destructive and process line-compatible. Raman spectroscopy meets these requirements but the diffraction limit prevents
Externí odkaz:
https://doaj.org/article/3e32e14132ee4fffbb250fe3586355c3
Publikováno v:
AIP Advances, Vol 6, Iss 8, Pp 085009-085009-6 (2016)
Since the early days of the investigation on resistive switching (RS), the independence of the ON-state resistance with actual cell area has been a trademark of filamentary-switching. However, with the continuous downscaling of the memory cell down t
Externí odkaz:
https://doaj.org/article/2d3d05c2898b46208b18cd26234677de
Akademický článek
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Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 439:59-63
Rutherford backscattering spectrometry (RBS) is an analysis method to quantify reference free the atomic areal density of a thin film, in particular sensitive to those cases where the elements of the film are heavier than the substrate. The ultimate
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2f221ab129621b9ebd3c20f7c4156f7c
https://doi.org/10.1016/j.nimb.2018.10.042
https://doi.org/10.1016/j.nimb.2018.10.042
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 406:66-70
A time of flight-energy (TOF-E) telescope is often used to detect the scattered and recoiled atoms in elastic recoil detection analysis. The experimental two-dimensional TOF-E histogram may be numerically transformed into a time of flight-mass (TOF-M
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::840b712b01e958f06917349276af0bd8
https://doi.org/10.1016/j.nimb.2016.12.028
https://doi.org/10.1016/j.nimb.2016.12.028
Autor:
Johannes Meersschaut, W. Vandervorst
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 406:25-29
We describe the ion beam analysis activities at imec. Rutherford backscattering spectrometry and time of flight-energy (TOF-E) elastic recoil detection analysis are pursued to support the nano-electronics research and development. We outline the expe
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0670de73b019b923ab4ff5a66a513cd8
https://doi.org/10.1016/j.nimb.2017.01.005
https://doi.org/10.1016/j.nimb.2017.01.005
Autor:
B, Groven, D, Claes, A, Nalin Mehta, H, Bender, W, Vandervorst, M, Heyns, M, Caymax, I, Radu, A, Delabie
Publikováno v:
The Journal of chemical physics. 150(10)
Monolayer-thin WS
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=pmid________::c6a420651974087f854f0dee1cf5f474
https://pubmed.ncbi.nlm.nih.gov/30876349
https://pubmed.ncbi.nlm.nih.gov/30876349
Publikováno v:
New Journal of Physics, Vol 15, Iss 9, p 093047 (2013)
We present a study of nanopattern formation on polycrystalline Ni surfaces upon low energy Ar ion bombardment. At low angles of ion incidence an isotropic, rough morphology develops on the surface while at grazing incidence a ripple structure paralle
Externí odkaz:
https://doaj.org/article/b2ae155668e34f97b116df446fd69261
Autor:
E. Capogreco, J. Bogdanowicz, W. Vandervorst, David Kohen, Roger Loo, Marc Schaekers, L. Witters, Steven Folkersma, Anurag Vohra, Robert Langer, Clement Porret, A. Hikavyy, J. Tolle
Publikováno v:
Extended Abstracts of the 2018 International Conference on Solid State Devices and Materials.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::51277d5975f577114f2ed3eb87456d20
https://doi.org/10.7567/ssdm.2018.c-3-05
https://doi.org/10.7567/ssdm.2018.c-3-05