Zobrazeno 1 - 10
of 45
pro vyhledávání: '"W. Dworschak"'
Autor:
C.M. Frey, Günther Dollinger, H. Ehrhardt, W. Dworschak, Thomas Faestermann, Andreas Bergmaier
Publikováno v:
Diamond and Related Materials. 4:478-481
Some experiments on the growth of cubic boron nitride (c-BN) show that the content of c-BN in BN films depends on the film thickness. Non-cubic phases, such as amorphous and hexagonal BN, can be identified, particularly near the substrate. To underst
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bf9675025db96cc58a7a46712d397df0
https://doi.org/10.1016/0925-9635(94)05252-2
https://doi.org/10.1016/0925-9635(94)05252-2
Publikováno v:
Thin Solid Films. 254:65-74
Boron nitride thin films have been deposited in a magnetic field r.f. glow discharge by the decomposition of diborane and nitrogen. The influence of ion current density, bias voltage, deposition time and gas composition are measured and can be explai
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c7ba09231af75eb3f7c20735ccecf984
https://doi.org/10.1016/0040-6090(94)06265-x
https://doi.org/10.1016/0040-6090(94)06265-x
Publikováno v:
Diamond and Related Materials. 3:337-340
c-BN films have been successfully prepared in a magnetic field enhanced r.f. glow discharge ( v r.f. = 13.56MHz). Without the magnetic field, only h-BN could be detected in the infrared (IR) spectra of the deposited films. The dependence of the c-BN
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5e38f4e912c7034cbfae44fcd77a36cb
https://doi.org/10.1016/0925-9635(94)90182-1
https://doi.org/10.1016/0925-9635(94)90182-1
Publikováno v:
Diamond and Related Materials. 1:316-320
a-C:H layers prepared at different ion energies have been characterised by several methods such as13C-NMR, EELS and ESR. With increasing ion energies from 30 eV to 170 eV, the sp2 fraction of the samples rises from 27% to about 60% and the spin densi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bf625bb27b21d26f9ebd36db61515d5c
https://doi.org/10.1016/0925-9635(92)90048-s
https://doi.org/10.1016/0925-9635(92)90048-s
Autor:
S. Roth, W. Dworschak, W. Scharff, K. Jung, K. Hammer, B. Mainz, R. Kleber, H. Ehrhardt, Olaf Stenzel, A. Krüger
Publikováno v:
Materials Science and Engineering: A. 140:784-787
A novel arrangement for the production of a microwave plasma by electron cyclotron resonance is described. Ion currents with current densities of up to 2.5 mA cm−2 can be homogeneously extracted from the plasma over surfaces having diameters of up
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c9537d8db9bb65da53c30882a3d6a77e
https://doi.org/10.1016/0921-5093(91)90514-n
https://doi.org/10.1016/0921-5093(91)90514-n
Autor:
S. Schulze, A. Krüger, W. Dworschak, J. Gerber, H. Ehrhardt, S. Deutschmann, H. Metz, R. Kleber, F. Engelke, I. Mühling, W. Scharff, K. Jung
Publikováno v:
Materials Science and Engineering: A. 140:775-779
Amorphous hydrogenated carbon films were prepared in an inductively-coupled 13.56 MHz r.f.-glow discharge. The C2H2 pressure varied between 4 × 10−4 mbar and 8.2 × 10−3 mbar. The average ion energies were in the range of about 30–350 eV. The
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9c490a46a86817cf95252658be42a958
https://doi.org/10.1016/0921-5093(91)90512-l
https://doi.org/10.1016/0921-5093(91)90512-l
Autor:
R. Kleber, H. Ehrhardt, K. Jung, A. Krüger, Till Dipl.-Phys. Wallendorf, F. Wolf, G. Schaarschmidt, S. Porsch, W. Scharff, W. Dworschak, F. Scholze, J. Gerber
Publikováno v:
Materials Science and Engineering: A. 140:788-794
In the present study mass spectrometric measurements were carried out on the ion flux to the substrate during the a-C:H deposition process by ion plating and r.f. glow discharge. For this purpose a portion of ion flux striking the substrate was passe
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5d0767ede5381f3278606896e13d64a0
https://doi.org/10.1016/0921-5093(91)90515-o
https://doi.org/10.1016/0921-5093(91)90515-o
Publikováno v:
Thin Solid Films. 189:257-267
An inductively coupled r.f. discharge was used to prepare amorphous hydrogenated carbon (a-C:H) films in a wide pressure range, at different ion energies, and at different substrate temperatures. Because of the inductive coupling the substrate bias a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::aab9e2a27ec1f04afe6989b81b2963e9
https://doi.org/10.1016/0040-6090(90)90454-l
https://doi.org/10.1016/0040-6090(90)90454-l
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Publikováno v:
Vacuum. 41:1378-1380
Amorphous hydrogenated carbon films have been prepared in an inductively coupled rf reactor. Due to the inductive coupling, the ion energy and the ion current density can be varied independently. At low pressures (8 × 10 −4 mbar ) rather high depo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::565641ce9f00556423ff3f3b6c97202c
https://doi.org/10.1016/0042-207x(90)93962-i
https://doi.org/10.1016/0042-207x(90)93962-i