Zobrazeno 1 - 10
of 31
pro vyhledávání: '"W. Brünger"'
Publikováno v:
Microelectronic Engineering. 21:159-163
Following the way to future x-ray nanolithography, the fabrication process of adequate resist patterns by means of e-beam lithography has been studied. Principal restrictions like high necessity of time for sequential exposure and statistical variati
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b6a604155d89839bd441c368fa552b02
https://doi.org/10.1016/0167-9317(93)90047-9
https://doi.org/10.1016/0167-9317(93)90047-9
Autor:
W. Brünger, A. Heuberger
Lithography of quarter micron devices is definitely in the domain of optical lithography, however, for the 0.18 mu m 1 Gbit devices the lithography tools have not been decided yet. There is the possibility of i-line and DUV steppers, e-beam direct wr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a28126de8179bccf099f0dbdb55bac8e
https://publica.fraunhofer.de/handle/publica/188980
https://publica.fraunhofer.de/handle/publica/188980
The pattern placement accuracy (PPA) is an important parameter in e-beam "direct write" for nanoelectronic applications. With a LEICA EBPG 4 HR, the influence of different mark/substrate combinations and of several writing parameters on the PPA was i
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::ce8b08fe6e1c1028816d8b9466ff53ff
https://publica.fraunhofer.de/handle/publica/184374
https://publica.fraunhofer.de/handle/publica/184374
Autor:
M. Klein, W. Brünger
Publikováno v:
Surface Science. 62:317-320
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fee227188f1ddcae025354f17a965901
https://doi.org/10.1016/0039-6028(77)90448-4
https://doi.org/10.1016/0039-6028(77)90448-4
Autor:
W. Brünger
Publikováno v:
Zeitschrift für Physik A Hadrons and nuclei. 250:263-272
Es wird ein UHV-Elektroneninterferometer mit Feldemissionskathode beschrieben, das nach einer neuen Moire-Methode die Bestimmung von Kontaktpotentialdifferenzen gestattet. Die Feldemissionskathode ermoglicht wegen ihrer kleinen virtuellen Quellengros
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::87170e9de2f9146a7773c8708611a110
https://doi.org/10.1007/bf01387463
https://doi.org/10.1007/bf01387463
Autor:
W. Brünger, W. Menz
Publikováno v:
Zeitschrift f�r Physik. 184:271-285
Absolute intensities of electrons scattered by amorphous carbon and germanium foils were measured for various energies (20–60 keV) and foil thicknesses (200–800 A). Electrons scattered elastically were separated from those scattered inelastically
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e65cdcd7d94237725ec5b6ee4f84c6e7
https://doi.org/10.1007/bf01383823
https://doi.org/10.1007/bf01383823
Autor:
W Brünger
Publikováno v:
Vacuum. 30:125-127
By the evaporation of a thin film of quartz with embedded gold particles, a highly efficient selective absorber is produced. The absorptance for solar radiation is α = 88 ± 1% and the hemispherical emittance e = 0.014 ± 0.005; α/e = 63.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1a3e1f9d31597cc31e233a368c567843
https://doi.org/10.1016/s0042-207x(80)80061-3
https://doi.org/10.1016/s0042-207x(80)80061-3
Autor:
W. Brünger
Publikováno v:
Proceedings, annual meeting, Electron Microscopy Society of America. 36:106-107
Reconstructive tomography is a new technique in diagnostic radiology for imaging cross-sectional planes of the human body /1/. A collimated beam of X-rays is scanned through a thin slice of the body and the transmitted intensity is recorded by a dete
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8b4924a56587239e1c39d82cc9f2952c
https://doi.org/10.1017/s0424820100107678
https://doi.org/10.1017/s0424820100107678
Autor:
W. Brünger
Publikováno v:
Die Naturwissenschaften. 55:295-295
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::abc5a485b1aeed69aec45eb98d2900dd
https://doi.org/10.1007/bf00591707
https://doi.org/10.1007/bf00591707
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