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Analytical Review on Enhancing Sustainability in microsystems by Integrating MEMS for Compact Design
Autor:
Vyas Sarvesh, Alhussainy Ali K., Raju Y. Kamala, Manjunatha, Pratap Srivastava Arun, Jain Alok, Vijetha T.
Publikováno v:
E3S Web of Conferences, Vol 552, p 01108 (2024)
By combining silicon-based microelectronics with micromachining technology, microelectromechanical systems (MEMS) have been identified as one of the most promising technologies for the 21st Century. With its microsystem-based devices and technologies
Externí odkaz:
https://doaj.org/article/e1cf40ed443548558659dd714e9d609e
