Zobrazeno 1 - 1
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pro vyhledávání: '"Von Jerick T. Marcos"'
Autor:
Hiroshi Matsui, Jeffrey R. Johnson, Von Jerick T. Marcos, Audrey M. Davis, Andrew E. Bair, Charles R. Spinner, Steve Tanner, Bradley D. Lantz
Publikováno v:
SPIE Proceedings.
Preventing the formation of defects at the interface between an organic bottom-side anti-reflective coating and a photoresist is problematic with the use of these films. These defects have been attributed to different sources, such as mismatch of sur
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::56afbe412fd6763771231665320b71dd
https://doi.org/10.1117/12.312463
https://doi.org/10.1117/12.312463
