Zobrazeno 1 - 2
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pro vyhledávání: '"Volker Dipl Phys Schlichting"'
Autor:
Volker Dipl Phys Schlichting, Ernst Obermeier, Andrea Giuliani, Domenico Arancio, Biswaijit Mukhopadhyay, Klaus-Dieter Lang, Lionello Drera, Vu Cong Thanh, Peter Mackowiak, Ha-Duong Ngo
Publikováno v:
2012 IEEE Sensors.
In this paper a novel liquid-free, piezoresistive pressure sensor on SOI-basis (Silicon On Insulator) for high temperature applications is presented. The sensor is capable of measuring pressures at temperature up to 400 °C (constant load) with an ac
Capacitive differential pressure sensor with high overload capability using silicon/glass technology
Publikováno v:
Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).
A capacitive pressure sensor for differential pressures of 100 kPa (1 bar) with an overload capability up to 25 MPa (250 bar) without the need for an external overload protection is presented. The sensing element consists of a Pyrex/silicon/Pyrex san