Analysis of p-type SiOx layers as a boron diffusion source for n-type c-Si substrates

Autor: Goyal, P., Urrejola, E., Hong, J., Voillot, J., Roca i Cabarrocas, P., Johnson, E.

We evaluate the use of p-type silicon oxide (p-SiOx) dielectric layers as a boron diffusion source for n-type crystalline silicon (c-Si) substrates. The p-SiOx layers grown on n-type c-Si substrates by plasma enhanced chemical vapor deposition using

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=od_______610::8cfed260525a54a6499639bd52662f70
https://publica.fraunhofer.de/handle/publica/246570

A flexible high-precision photoacoustic retinal prosthesis.

Autor: Leong A; Sorbonne Université, CNRS, INSERM, Institut de la Vision, F-75012 Paris, France., Li Y; Department of Electrical and Computer Engineering, Boston University, Boston, MA, 02215, United States., Ruikes TR; Sorbonne Université, CNRS, INSERM, Institut de la Vision, F-75012 Paris, France., Voillot J; Axorus SAS, Loos, 59120, France., Yuan Y; Department of Electrical and Computer Engineering, Boston University, Boston, MA, 02215, United States., Chen G; Department of Electrical and Computer Engineering, Boston University, Boston, MA, 02215, United States., Facon A; Axorus SAS, Loos, 59120, France., Chhuon CA; Axorus SAS, Loos, 59120, France., Joffrois C; Sorbonne Université, CNRS, INSERM, Institut de la Vision, F-75012 Paris, France., Tessier G; Sorbonne Université, CNRS, INSERM, Institut de la Vision, F-75012 Paris, France., Cornebois M; Sorbonne Université, CNRS, INSERM, Institut de la Vision, F-75012 Paris, France., Dégardin J; Sorbonne Université, CNRS, INSERM, Institut de la Vision, F-75012 Paris, France., Louise J; Axorus SAS, Loos, 59120, France., Cheng JX; Department of Electrical and Computer Engineering and Department of Biomedical Engineering, Boston University, Boston, MA, 02215, United States., Yang C; Department of Electrical and Computer Engineering and Department of Chemistry, Boston University, Boston, MA, 02215, United States., Moulet H; Axorus SAS, Loos, 59120, France., Picaud S; Sorbonne Université, CNRS, INSERM, Institut de la Vision, F-75012 Paris, France.

Publikováno v: BioRxiv : the preprint server for biology [bioRxiv] 2024 Nov 22. Date of Electronic Publication: 2024 Nov 22.