Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Voets, Rutger"'
Lithographic performance of an ASML i-line step-and-repeat system by using photosensitive Durimides.
Autor:
Pellens, Rudy J. M., van Klaveren, Angelique, Voets, Rutger, van den Heuvel, Jean-Paul, Misat, Sylvain, Waterson, Pamela J., Peterson, Laurie J.
Publikováno v:
Proceedings of SPIE; Nov2003, Issue 1, p122-129, 8p
Autor:
Misat, Sylvain I., Pellens, Rudy J. M., Voets, Rutger, van Klaveren, Angelique, van den Heuvel, Jean-Paul, Peterson, L., Waterson, Pamela J., Racicot, D., Roza, D.
Publikováno v:
Proceedings of SPIE; Nov2003, Issue 1, p410-421, 12p