Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Vladislav Yu Lisenkov"'
Publikováno v:
Plasma Sources Science and Technology.
Arrival of highly energetic (near 1000 eV) positive atomic oxygen ions to the substrate region has been detected in a unipolar reactive HiPIMS process operated with uncooled copper target in argon–oxygen mixtures. Examination of ion fluxes from dis
Autor:
Andrey V. Kaziev, Dobrynya V. Kolodko, Vladislav Yu. Lisenkov, Alexander V. Tumarkin, Maksim M. Kharkov, Nikolay N. Samotaev, Konstantin Yu. Oblov
Publikováno v:
Coatings; Volume 13; Issue 2; Pages: 238
We examined the feasibility of alumina substrate metallization by magnetron deposition of copper coatings with thickness of several tens µm for its prospective applications in production of ceramic PCBs and packaging. The films were prepared in magn
Autor:
D. V. Kolodko, Nikita S. Sergeev, Vladislav Yu. Lisenkov, A. V. Tumarkin, Maksim M. Kharkov, Andrey V. Kaziev
Publikováno v:
Surface and Coatings Technology. 409:126889
Thermal properties of the magnetron discharge with uncooled copper and chromium targets were studied experimentally and theoretically for DC and long HiPIMS (L-HiPIMS) operation modes. A set of thermal fluxes was considered to build a numerical model