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pro vyhledávání: '"Vladimir V. Privesentsev"'
Autor:
Ksenia B. Eidelman, Nataliya Yu. Tabachkova, Kirill D. Shcherbachev, Yuri N. Parkhomenko, Vladimir V. Privesentsev, Denis M. Migunov
Publikováno v:
Modern Electronic Materials, Vol 3, Iss 3, Pp 104-109 (2017)
This work deals with the study of structural transformations in the near-surface layers of silicon after ion beam synthesis of zinc-containing nanoparticles. Phase formation after implantation of Zn+ ions and two-stage implantation of O+ and Zn+ ions
Externí odkaz:
https://doaj.org/article/219f920d8bf148f4969cc4a22f3ba489
