Zobrazeno 1 - 10
of 16
pro vyhledávání: '"Vladimir N. Genkin"'
Autor:
Vladimir N. Genkin
Publikováno v:
Advances in Resist Technology and Processing XI.
The chemical amplified resists are a good way of the solution of the X-ray, e-beam and DUV resist sensitivity problem. The difficulties of this way are connected with a high temperature diffusion during the process of the chemical amplification [1] (
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5908af96f066772b7b2c90c6b93946b4
https://doi.org/10.1117/12.175351
https://doi.org/10.1117/12.175351
Autor:
M. Y. Myl'nikov, Vladimir N. Genkin
Publikováno v:
Advances in Resist Technology and Processing XI.
The development processes in microlithography consist in removing of exposure region with rate V exceeding the dissolution rate of unexposed regions. The technology characteristics of the resists are the contrast, the sensitivity and the resolution.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0560e2cefc89c97d3e55eb221d5f1f67
https://doi.org/10.1117/12.175387
https://doi.org/10.1117/12.175387
Autor:
M. Y. Myl'nikov, Vladimir N. Genkin
Publikováno v:
Advances in Resist Technology and Processing X.
In the fabrication of integrated circuits (IC) the solubility dependence of a polymer on its macromolecular length is used. The development process is multistage and involves series thicknesses just as in photo and plasma etching. In lithography this
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d15b2cf461f5458a0ce5ee28b16cf9e6
https://doi.org/10.1117/12.154786
https://doi.org/10.1117/12.154786
Autor:
G. P. Bobilkov, Vladimir N. Genkin
Publikováno v:
SPIE Proceedings.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5045f4df0c549b531aa6709a63c406a4
https://doi.org/10.1117/12.48140
https://doi.org/10.1117/12.48140
Autor:
V. G. Kurin, A. V. Okomel’kov, Alexander A. Andronov, I. A. Shereshevsky, Vladimir N. Genkin, Mark Ghinovker, I. M. Nefedov
Publikováno v:
SPIE Proceedings.
Dynamic processes in 1D superconducting superlattices (SSLs) with a period substantially higher than the coherence length are investigated theoretically. The dynamic resistive state and the nonlinear response to laser irradiation are studied. The res
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d21a996fcea0d829e3f3748089519ae1
https://doi.org/10.1117/12.24450
https://doi.org/10.1117/12.24450
Autor:
Vladimir N. Genkin
Publikováno v:
SPIE Proceedings.
Some aspects of photomodification of polymer glasses and their applicability for the tasks of Xray 1ithograph are discussed. 1. Modification of dielectrics in the fields smaller than the atomic ones results from the absorption of'' light which can be
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e7656a00b4aacf5208d11cb9e73863a8
https://doi.org/10.1117/12.23704
https://doi.org/10.1117/12.23704
Publikováno v:
Soviet Journal of Quantum Electronics. 7:547-550
An expression is found for the function describing the molecular-weight distribution of a polymer formed by pulse-periodic initiation of polymerization. A study is made of the dependence of the molecular-weight distribution on the parameters of the i
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8fba08c93989924c56d667bfc21dbbc4
https://doi.org/10.1070/qe1977v007n05abeh012534
https://doi.org/10.1070/qe1977v007n05abeh012534
Publikováno v:
Soviet Journal of Quantum Electronics. 15:1504-1509
An experimental investigation was made of the stability of polymethylmethacrylate containing different amounts of dibutylphthalate plasticizer under the action of neodymium laser radiation (λ = 1.06 μ, τp = 30 nsec). The concentration of the cente
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1bfc877579435a046970c3dbb185ebca
https://doi.org/10.1070/qe1985v015n11abeh007968
https://doi.org/10.1070/qe1985v015n11abeh007968
Publikováno v:
Polymer Science U.S.S.R.. 23:1873-1882
An explanation of the gel-effect is proposed based on a representation of the change of the type of diffusion in macromolecules in moderately concentrated solution with increasing conversion by taking into account the non-equivalence of contacts of m
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::27f59cfc6b9533ddca72cc6372a3e222
https://doi.org/10.1016/0032-3950(81)90065-4
https://doi.org/10.1016/0032-3950(81)90065-4
Autor:
G.T. Fedoseyeva, V.V. Sokolov, L.D. Strelkova, Vladimir N Genkin, K.V. Nikitin, Nikita Bityurin, V.P. Lebedev
Publikováno v:
Polymer Science U.S.S.R.. 25:91-97
The structure of the surface layer of photodegraded PVC has been studied. It has been shown that next to the surface there lies a region of accumulated phot-oxidation products which is characterized by a small change in the absorption coefficient and
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6e8e57602fa202404ba6414ab7a28f3c
https://doi.org/10.1016/0032-3950(83)90381-7
https://doi.org/10.1016/0032-3950(83)90381-7