Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Vladimir M. Krivtsun"'
Autor:
Konstantin N. Koshelev, Vladimir V. Ivanov, Vladimir G. Novikov, Viacheslav Medvedev, Alexander S. Grushin, Vladimir M. Krivtsun
Publikováno v:
Journal of micro/nanolithography, MEMS, and MOEMS, 11(2):021112. SPIE
An integrated model is developed to describe the hydrodynamics, atomic, and radiation processes that take place in extreme ultraviolet (EUV) radiation sources based on a laser-produced plasma with a distributed tin target. The modeling was performed
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::142a5b8a3bf80dd91628ee6285cd51be
https://research.utwente.nl/en/publications/rzline-code-modelling-of-distributed-tin-targets-for-laserproduced-plasma-sources-of-extreme-ultraviolet-radiation(93671621-2a58-4477-bf1f-134b8aad2966).html
https://research.utwente.nl/en/publications/rzline-code-modelling-of-distributed-tin-targets-for-laserproduced-plasma-sources-of-extreme-ultraviolet-radiation(93671621-2a58-4477-bf1f-134b8aad2966).html
Autor:
Konstantin N. Koshelev, Vladimir V. Ivanov, Vladimir G. Novikov, Viacheslav Medvedev, Alexander S. Grushin, Vladimir M. Krivtsun
Publikováno v:
Journal of Micro/Nanolithography, MEMS, and MOEMS. 11:029802-1
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::539ac9b34961d1ab5e4e31d0425a1c50
https://doi.org/10.1117/1.jmm.11.2.029802
https://doi.org/10.1117/1.jmm.11.2.029802
