Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Vladimir I. Strunin"'
Autor:
Ivan V. Nikolaev, Pavel V. Geydt, Nikolay G. Korobeishchikov, Aleksandr V. Kapishnikov, Vladimir A. Volodin, Ivan A. Azarov, Vladimir I. Strunin, Evgeny Y. Gerasimov
Publikováno v:
Nanomaterials, Vol 12, Iss 4, p 670 (2022)
In this paper, the influence of surface modification on the characteristics and properties of AlN thin films on Si and glass-ceramics substrates is investigated. The surface modification was made at various parameters of argon cluster ions. By using
Externí odkaz:
https://doaj.org/article/0acd618860834ea28ccb151eb70f6cdc
Autor:
Maria I. Mironova, Aleksandr V. Kapishnikov, Ghaithaa A. Hamoud, Vladimir A. Volodin, Ivan A. Azarov, Ivan D. Yushkov, Gennadiy N. Kamaev, Evgeny A. Suprun, Nikita A. Chirikov, Nadim A. Davletkildeev, Alexey N. Baidakov, Vladimir S. Kovivchak, Larisa V. Baranova, Vladimir I. Strunin, Pavel V. Geydt
Publikováno v:
Coatings; Volume 13; Issue 2; Pages: 223
Composite thin films of the AlN–Al–V type, grown by magnetron sputtering, were analyzed by several complementary diagnostic methods. The power of the magnetron was used as a variable parameter, while gas flows, chamber pressure, and substrate tem
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::50dbf79520a048b38bba8e08783fe931