Planar magnetron sputtering with supplementary electron injection

Autor: Shandrikov, Maxim V., Bugaev, Alexey S., Oks, Efim M., Vizir, Alexey V., Yushkov, Georgy Yu.

Publikováno v: In Vacuum September 2017 143:458-463

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Sources of high-density gaseous plasma based on a discharge with electron injection

Autor: Vizir, Alexey V., Shandrikov, M.V., Oks, Efim M., Yushkov, Georgy Yu, Anders, Andre, Baldwin, David A.

Publikováno v: Vizir, Alexey V.; Shandrikov, M.V.; Oks, Efim M.; Yushkov, Georgy Yu; Anders, Andre; & Baldwin, David A.(2005). Sources of high-density gaseous plasma based on a discharge with electron injection. Lawrence Berkeley National Laboratory: Lawrence Berkeley National Laboratory. Retrieved from: http://www.escholarship.org/uc/item/9f77207b

A novel technique of high-density gaseous plasma generation was explored, and several plasma sources based on this technique were developed. The sources utilize a DC high-current (up to 35 A) gaseous discharge with electron injection into the cathode

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=od_______325::d0f5e22ffc98bbb9781360e0c7a25333
http://www.escholarship.org/uc/item/9f77207b

Metal and gas ion source for modification of organic polymers surfaces.

Autor: Oks, Efim M., Savkin, Konstantin P., Puhova, Irina V., Yushkov, Georgy Yu., Shandrikov, Maxim V., Vizir, Alexey V., Kurzina, Irina A.

Publikováno v: 2015 IEEE International Conference on Plasma Sciences (ICOPS); 2015, p1-1, 1p