Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Vitaly Kuzmenko"'
Autor:
Andrey Miakonkikh, Vitaly Kuzmenko
Publikováno v:
Nanomaterials, Vol 14, Iss 11, p 945 (2024)
This article discusses a method for forming black silicon using plasma etching at a sample temperature range from −20 °C to +20 °C in a mixture of oxygen and sulfur hexafluoride. The surface morphology of the resulting structures, the autocorrela
Externí odkaz:
https://doaj.org/article/a54ff257383140a29f339bae5ff52891
Autor:
Andrey Miakonkikh, Anton Shishlyannikov, Andrey Tatarintsev, Vitaly Kuzmenko, Konstantin Rudenko, Evgeniy Gornev
Publikováno v:
International Conference on Micro- and Nano-Electronics 2021.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3dc5acd978d7cae415f6e0f65c3706fc
https://doi.org/10.1117/12.2626386
https://doi.org/10.1117/12.2626386
Publikováno v:
Vacuum. 204:111326
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ab8db560f8727e485a15bcffcf4c5250
https://doi.org/10.1016/j.vacuum.2022.111326
https://doi.org/10.1016/j.vacuum.2022.111326
Publikováno v:
Vacuum. 200:110991
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c164831d9fbd52590a28c722e2246d89
https://doi.org/10.1016/j.vacuum.2022.110991
https://doi.org/10.1016/j.vacuum.2022.110991