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Theoretical studies of physical processes and phenomena in the zone of physical interaction of nanoinstruments with the surfaces of elements of microsystem technology are carried out in work. Based on the conducted research, mathematical models of en
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=od______2001::7d58e38cb41461176d0747e046553244
https://essuir.sumdu.edu.ua/handle/123456789/91584
https://essuir.sumdu.edu.ua/handle/123456789/91584
