Zobrazeno 1 - 10
of 117
pro vyhledávání: '"Vishnevskiy, A. S."'
Autor:
Vishnevskiy, Alexey S., Seregin, Dmitry S., Palov, Alexander P., Orlov, Georgy A., Yakushev, Vladislav A., Ovchinnikov, Ivan S., Vorotilov, Konstantin A., Baklanov, Mikhail R.
Publikováno v:
In Microporous and Mesoporous Materials 1 January 2024 363
Publikováno v:
In Journal of Non-Crystalline Solids 15 January 2022 576
Autor:
Baklanov, Mikhail R., Gismatulin, Andrei A., Naumov, Sergej, Perevalov, Timofey V., Gritsenko, Vladimir A., Vishnevskiy, Alexey S., Rakhimova, Tatyana V., Vorotilov, Konstantin A.
Publikováno v:
Polymers (20734360); Aug2024, Vol. 16 Issue 15, p2230, 47p
Autor:
Ryabinkin, Alexey N., Vishnevskiy, Alexey S., Naumov, Sergej, Serov, Alexander O., Maslakov, Konstantin I., Seregin, Dmitry S., Vorotyntsev, Dmitry A., Pal, Alexander F., Rakhimova, Tatyana V., Vorotilov, Konstantin A., Baklanov, Mikhail R.
Publikováno v:
Plasma Processes & Polymers; May2024, Vol. 21 Issue 5, p1-20, 20p
Publikováno v:
Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; Sep2023, Vol. 41 Issue 5, p1-18, 18p
Autor:
Nozdrin, Vadim S., Komandin, Gennadiy A., Spektor, Igor E., Chernomyrdin, Nikita V., Seregin, Dmitry S., Vishnevskiy, Alexey S., Vorotilov, Konstantin A.
Publikováno v:
Journal of Applied Physics; 1/14/2022, Vol. 131 Issue 2, p1-11, 11p
Publikováno v:
Russian Microelectronics; 2023 Suppl 1, Vol. 52, pS232-S239, 8p
Autor:
Serov, Alexander O., Ryabinkin, Alexey N., Vishnevskiy, Alexey S., Naumov, Sergej, Pal, Alexander F., Rakhimova, Tatyana V., Seregin, Dmitry S., Vorotilov, Konstantin A., Baklanov, Mikhail R.
Publikováno v:
Plasma Processes & Polymers; Apr2023, Vol. 20 Issue 4, p1-14, 14p
Publikováno v:
Coatings (2079-6412); Sep2023, Vol. 13 Issue 9, p1656, 19p
Autor:
Zotovich, A. I., Zyryanov, S. M., Lopaev, D. V., Rezvanov, A. A., Attallah, A. G., Liedke, M. O., Butterling, M., Bogdanova, M. A., Vishnevskiy, A. S., Seregin, D. S., Vorotyntsev, D. A. V., Palov, A. P., Hirschmann, E., Wagner, A., Naumov, S., Vorotilov, K. A., Rakhimova, T. V., Rakhimov, A. T. R., Baklanov, M.
Publikováno v:
Publication date: 2023-01-11 Open accessDOI: 10.14278/rodare.2075Versions: 10.14278/rodare.2076License: CC-BY-4.0
Modification of spin-on-deposited porous PMO (periodic mesoporous organosilica) ultralow-k (ULK) SiCOH films (k = 2.33) containing both methyl terminal and methylene bridging groups by vacuum ultraviolet (VUV) emission from Xe plasma is studied. The
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=od______4577::3f190b8e1ba4209058266a65e8140d52
https://www.hzdr.de/publications/Publ-36205-1
https://www.hzdr.de/publications/Publ-36205-1