High Spatial Resolution Time-of-Flight Secondary Ion Mass Spectrometry for the Masses: A Novel Orthogonal ToF FIB-SIMS Instrument with In Situ AFM

Autor: James A. Whitby, Fredrik Östlund, Peter Horvath, Mihai Gabureac, Jessica L. Riesterer, Ivo Utke, Markus Hohl, Libor Sedláček, Jaroslav Jiruše, Vinzenz Friedli, Mikhael Bechelany, Johann Michler

Publikováno v: Advances in Materials Science and Engineering, Vol 2012 (2012)

We describe the design and performance of an orthogonal time-of-flight (TOF) secondary ion mass spectrometer that can be retrofitted to existing focused ion beam (FIB) instruments. In particular, a simple interface has been developed for FIB/SEM inst

Externí odkaz: https://doaj.org/article/eaeebff03f0a452da05750683fcaff68

Measurement and simulation of impinging precursor molecule distribution in focused particle beam deposition/etch systems

Autor: Ivo Utke, Vinzenz Friedli, Johann Michler, Simone Amorosi, Patrik Hoffmann

Publikováno v: Microelectronic Engineering. 83:1499-1502

The distribution of metal-precursors supplied via a gas injection system to the substrate inside a focused electron beam (FEB) induced deposition system is investigated for the first time. The impinging precursor molecules are thermally decomposed us

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::fb0b2009cbfb5c20386edfd7b7c947ae
https://doi.org/10.1016/j.mee.2006.01.136

High Spatial Resolution Time-of-Flight Secondary Ion Mass Spectrometry for the Masses: A Novel Orthogonal ToF FIB-SIMS Instrument with In Situ AFM

Autor: Peter Horvath, Fredrik Östlund, Ivo Utke, Vinzenz Friedli, Mihai Gabureac, James A. Whitby, Mikhael Bechelany, Jessica L. Riesterer, Jaroslav Jiruše, Libor Sedlacek, Markus Hohl, Johann Michler

Publikováno v: Advances in Materials Science and Engineering
Advances in Materials Science and Engineering, Hindawi Publishing Corporation, 2012, 2012, pp.1-13. ⟨10.1155/2012/180437⟩
Advances in Materials Science and Engineering, Vol 2012 (2012)

We describe the design and performance of an orthogonal time-of-flight (TOF) secondary ion mass spectrometer that can be retrofitted to existing focused ion beam (FIB) instruments. In particular, a simple interface has been developed for FIB/SEM inst

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::3b278f730e728c3b1defbfe98e167a8e
https://hal.umontpellier.fr/hal-01692106

In-situ monitoring of gas-assisted focused ion beam and focused electron beam induced processing

Autor: Ivo Utke, Mihai Gabureac, Johann Michler, Vinzenz Friedli, Laurent Bernau

Publikováno v: Journal of Physics: Conference Series. 241:012072

The state of the art of several in-situ monitoring techniques for gas assisted focused ion beam and focused electron beam induced processing (FIBIP and FEBIP) is presented. The monitoring techniques discussed comprise (a) the stage current and second

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::10f72d57968ca77b82e267f7f7fb0018
https://doi.org/10.1088/1742-6596/241/1/012072

Mass sensor for in situ monitoring of focused ion and electron beam induced processes

Autor: Ivo Utke, Vinzenz Friedli, Christian Santschi, Patrik Hoffmann, Johann Michler

Publikováno v: Applied Physics Letters. 90:053106

A cantilever-based mass sensor for in situ monitoring of deposition and milling using focused ion and electron beams is presented. Carefully designed experiments allowed for mass measurements with a noise level of ±10fg by tracking the resonance fre

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::5fb273164ec573ec04dfcc47d9bf5636
https://doi.org/10.1063/1.2435611