Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Vince Laraia"'
Autor:
Jennifer Sokol, John Zabasajja, Adam Ticknor, Vamsi Devarapalli, Sana Rafie, Matt Fritz, Vince Laraia, Wei-Tsu Tseng, Connie Truong, Christopher Majors
Publikováno v:
ECS Journal of Solid State Science and Technology. 4:P5001-P5007
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::886dd895d4ee20525db0d4b074c54397
https://doi.org/10.1149/2.0011511jss
https://doi.org/10.1149/2.0011511jss
Publikováno v:
ECS Meeting Abstracts. :1047-1047
This work demonstrates the performance of a microreplicated pad used in a W buff polish process. 3M™ Trizact™ microreplicated pads consist of matrix designed asperitity and pore structures that can be tuned independently, into a wide variety of c
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2432191b71c71941e136d31604b8abac
https://doi.org/10.1149/ma2019-01/17/1047
https://doi.org/10.1149/ma2019-01/17/1047
Autor:
Vamsi Devarapalli, Jennifer Sokol, Wei-Tsu Tseng, Elliott Rill, Vince Laraia, Sana Rafie, Adam Ticknor, John Zabasajja, Matt Fritz, Charles Gould
Publikováno v:
Proceedings of International Conference on Planarization/CMP Technology 2014.
Metal-free micro-replicated conditioning disks are applied to the development of Cu and Cu barrier CMP processes for 22nm technology nodes. Compared with traditional pad conditioners with diamond grits embedded in metal matrix, the micro-replicated c
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::41b8e5f84f177834d22f99d138cb8839
https://doi.org/10.1109/icpt.2014.7017269
https://doi.org/10.1109/icpt.2014.7017269
Publikováno v:
Proceedings of International Conference on Planarization/CMP Technology 2014.
In this paper, a novel pad conditioner, 3MTM TrizactTM Pad Conditioner, B6-M990, consisting of precisely engineered microreplicated abrasive structures coated with a chemical vapor deposited (CVD) diamond film is demonstrated for Front End Of Line (F
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1233029dc386fcb3da88236901f3caba
https://doi.org/10.1109/icpt.2014.7017307
https://doi.org/10.1109/icpt.2014.7017307