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pro vyhledávání: '"Viktor Kogotkov"'
Autor:
Vladislav Voronenkov, Natalia Bochkareva, Ruslan Gorbunov, Andrey Zubrilov, Viktor Kogotkov, Philipp Latyshev, Yuri Lelikov, Andrey Leonidov, Yuri Shreter
Publikováno v:
Results in Physics, Vol 13, Iss , Pp - (2019)
A femtosecond laser focused inside bulk GaN was used to slice a thin GaN film with an epitaxial device structure from a bulk GaN substrate. The demonstrated laser slicing lift-off process did not require any special release layers in the epitaxial st
Externí odkaz:
https://doaj.org/article/416d327c838c4593a4528217ab9158e5
