Zobrazeno 1 - 10
of 14
pro vyhledávání: '"Victor V. Naumov"'
Autor:
Alexander S. Rudy, Sergei V. Kurbatov, Alexander A. Mironenko, Victor V. Naumov, Alexander M. Skundin, Yulia S. Egorova
Publikováno v:
Batteries, Vol 8, Iss 8, p 87 (2022)
The description of the design, manufacturing technology, and test results of thin-film solid-state lithium-ion batteries with a nanocomposite negative electrode Si@O@Al is given herein. This electrochemical system features the hike on the charging cu
Externí odkaz:
https://doaj.org/article/a49e2b66282148f5ba36d089c2d22bdf
Publikováno v:
Microsystem Technologies. 26:1971-1980
An important step in the MEMS switch fabrication is the formation of a suspended micron-sized beam. Typically, the beam is made of gold due to its high electrical conductivity and chemical inertness. However, the fabrication process is complicated by
Publikováno v:
Microsystem Technologies. 25:4135-4141
MEMS switches have a wide range of potential applications in radio frequency and microwave systems due to promising characteristics. However, these devices are still not widespread because of reliability issues. The weak point of the resistive MEMS s
Publikováno v:
Journal of Micromechanics and Microengineering, 29(11):114001. IOP PUBLISHING LTD
Microfluidic systems require a compact, energy-efficient and microtechnology-compatible actuator that pushes the liquid through the channels. Electrochemical devices are promising candidates, but they suffer from a long response time due to slow gas
Publikováno v:
SPIE Proceedings.
Electrostatically actuated MEMS switch with the resistive contact is presented. Design of the switch includes the active contact breaking mechanism, which allows to detach the beam from the signal electrode in case of sticking. The mechanism is reali
Publikováno v:
SPIE Proceedings.
MEMS switch with the electrostatic actuation and the resistive contact was fabricated using surface micromachining. The movable electrode of the switch was the three-layer metallic cantilever having nanoscale thickness and high lengthto- thickness ra
Publikováno v:
SPIE Proceedings.
Resonant properties of the three-layer metallic cantilevers with 40 nm thickness are investigated. Two types of the nanocantilevers were fabricated: Cr-Al-Cr and Ti-Al-Ti. Resonant frequencies of the nanocantilevers were determined from the experimen
Publikováno v:
Journal of Physics: Conference Series. 643:012091
Electrostatically actuated MEMS switch with resistive contact is presented. Movable electrode of the switch is a beam suspended by torsion springs. Low stiffness of springs allows to achieve the low values of the actuation voltage. Main feature of th
Publikováno v:
Journal of Physics: Conference Series. 541:012018
Resonant properties of the three-layer metallic cantilevers with 40-120 nm thickness were investigated. Two types of cantilevers were fabricated: Cr/Al/Cr and Ti/Al/Ti. Dependencies of the fundamental resonant frequency and Q-factor on the cantilever
Publikováno v:
Journal of Micromechanics & Microengineering; Nov2019, Vol. 29 Issue 11, p1-1, 1p