Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Victor Joseph Silvestri"'
Publikováno v:
Journal of Electronic Materials. 4:429-444
A chemical vapor deposition process for depositing dielectric films of aluminum oxynitride is described. AlCl3, CO2 and NH3 were employed as the reactive gases in a nitrogen carrier. Films were grown from the mixed gases at 770 and 900°C in a resist
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9f4503b99bdad9a1577244ce762ea72e
https://doi.org/10.1007/bf02666228
https://doi.org/10.1007/bf02666228
Publikováno v:
Journal of Electronic Materials. 4:409-427
Transmission electron microscopy (TEM) studies of films prepared in the AlN-Al2O3 pseudobinary system by chemical vapor deposition (as described in a companion paper entitled, “Chemical Vapor Deposition of AlxOyNz Films”) indicates that four diff
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::be24e27c37ab51e74a3938653b649eef
https://doi.org/10.1007/bf02666227
https://doi.org/10.1007/bf02666227