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pro vyhledávání: '"Victor Andrew Firtion"'
Autor:
James T. Clemens, Bruce E. Wilcomb, Gary C. Escher, James H. Bennewitz, Tanya E. Jewell, Martin Feldman, Victor Andrew Firtion, Victor Pol
Publikováno v:
SPIE Proceedings.
A deep UV projection system has been developed by modifying a commercial step and repeat exposure tool to operate at 248nm with an all-quartz lens and a KrF excimer laser. The lens is a 5X reduction lens with a minimum field size of 14.5 mm and a num
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f622e34ee398d21fd2e00f0f6d0079ba
https://doi.org/10.1117/12.963697
https://doi.org/10.1117/12.963697
