Zobrazeno 1 - 10
of 13
pro vyhledávání: '"Vianney Koelman"'
Publikováno v:
Physical Chemistry Chemical Physics, 23, 13878-13884
Physical Chemistry Chemical Physics
Physical Chemistry Chemical Physics, 23(25), 13878-13884. Royal Society of Chemistry
Physical chemistry chemical physics, 23(25), 13878-13884. Royal Society of Chemistry
Physical Chemistry Chemical Physics
Physical Chemistry Chemical Physics, 23(25), 13878-13884. Royal Society of Chemistry
Physical chemistry chemical physics, 23(25), 13878-13884. Royal Society of Chemistry
An atomistic description of tin deposition on ruthenium and its effect on blistering damage is of great interest in extreme ultraviolet (EUV) lithography. In EUV machines, tin debris from the EUV-emitting tin plasma may be deposited on the mirrors in
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::acbf609b97b770158cef08b8936a82c6
https://doi.org/10.1039/d1cp01082d
https://doi.org/10.1039/d1cp01082d
Publikováno v:
Physical chemistry chemical physics, 22(15), 7935-7941. Royal Society of Chemistry
Physical Chemistry Chemical Physics, 22, 7935-7941
Physical Chemistry Chemical Physics, 22(15), 7935-7941. Royal Society of Chemistry
Physical Chemistry Chemical Physics, 22, 7935-7941
Physical Chemistry Chemical Physics, 22(15), 7935-7941. Royal Society of Chemistry
Hydrogen permeation into mirrors used in extreme ultraviolet lithography results in the formation of blisters, which are detrimental to reflectivity. An understanding of the mechanism via which hydrogen ends up at the interface between the top ruthen
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::dee84bc3202b397373fba1c096b98d86
https://research.utwente.nl/en/publications/39b611ad-1d0f-4a09-9be8-9d4720ca26d6
https://research.utwente.nl/en/publications/39b611ad-1d0f-4a09-9be8-9d4720ca26d6
Publikováno v:
International Petroleum Technology Conference.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::68e0f7c45c663625aec0d1d554cca094
https://doi.org/10.2523/14629-ms
https://doi.org/10.2523/14629-ms
Publikováno v:
Physical Chemistry Chemical Physics (PCCP); 7/7/2021, Vol. 23 Issue 25, p13878-13884, 7p
Publikováno v:
Physical Chemistry Chemical Physics (PCCP); 7/7/2021, Vol. 23 Issue 25, p13775-13784, 10p
Publikováno v:
Physical Chemistry Chemical Physics (PCCP); 4/21/2020, Vol. 22 Issue 15, p7935-7941, 7p
Autor:
Nair, Nitish, Koelman, J. Vianney
Publikováno v:
Transport in Porous Media; Sep2018, Vol. 124 Issue 2, p413-437, 25p
Publikováno v:
2015 IEEE 22nd International Conference on High Performance Computing (HiPC); 1/1/2015, pxiv-xviii, 5p
Publikováno v:
2015 IEEE 22nd International Conference on High Performance Computing Workshops; 1/1/2015, pxi-xiii, 3p
Autor:
Stephen Rassenfoss
Publikováno v:
Journal of Petroleum Technology. 64:36-43
Fiber optic sensing Magnus McEwen-King describes his company’s vision by saying it is out to build “the Earth’s nervous system.” The company, Qinetiq, has a venture, OptaSense, which is developing practical ways to use fiber optic cable for d
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1addd4bf250ff3f2776c63bf1602d8e1
https://doi.org/10.2118/0312-0036-jpt
https://doi.org/10.2118/0312-0036-jpt