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pro vyhledávání: '"Vianesh Viswanathan"'
Autor:
Kelvin Loh, Vianesh Viswanathan
Publikováno v:
2020 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA).
The circular differential interference contrast (C-DIC) imaging module provides a novel contrast mechanism to end-point and precisely identify different layers in the semiconductor die BEOL. This provides a unique value add in the semiconductor FA wo