FOUP Material Influence on HF Contamination during Queue-Time

Autor: Bounouar, Julien, Nguyen, Thi Quynh, Le-Barillec, Olivier, Favre, Arnaud, Veran, Emmanuelle, Stassen, Ingo, Gettel, Astrid

Publikováno v: Diffusion and Defect Data Part B: Solid State Phenomena; September 2014, Vol. 219 Issue: 1 p251-255, 5p