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pro vyhledávání: '"Vera Peldzinski"'
Publikováno v:
Journal of Crystal Growth. 478:220-228
Copper films for printed circuit board applications have to be fine-grained to achieve even filling of vias. Electroplated Cu films on roll annealed Cu substrates may have unacceptably large epitaxial crystals. Here galvanic films were plated on orie
Publikováno v:
Electrochimica Acta. 196:479-486
The time evolution of galvanically plated copper films designed for semi additive processing (SAP) was investigated. Blanket copper films were plated at three current densities. Stress was monitored with the substrate curvature method during and afte