Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Venkataramana Chavva"'
Autor:
Shengwu Chang, Venkataramana Chavva, Frank Sinclair, Jiro Matsuo, Masataka Kase, Takaaki Aoki, Toshio Seki
Publikováno v:
AIP Conference Proceedings.
The deliberate use of channeling to control depth profiles has come of age in the application to CMOS imaging sensor device manufacturing. In order to enable the true zero implant application on VIISta3000, we have optimized beam incidence angle cont
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::11c34fd4440c159dc7488907e864fdff
https://doi.org/10.1063/1.3548419
https://doi.org/10.1063/1.3548419
