Characterization of nano-coated micro- and nanostructures by pushing.

Autor: Liimatainen, Ville, Venalainen, Janne, Koverola, Mikko, Zhou, Quan, Lyytinen, Jussi, Koskinen, Jari, Rontu, Ville, Berdova, Maria, Franssila, Sami

Publikováno v: 2014 International Conference on Manipulation, Manufacturing & Measurement on the Nanoscale (3M-NANO); 2014, p23-27, 5p