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pro vyhledávání: '"Vegard Tollefsen"'
Autor:
Bruno Comis Bersch, Tomàs Caminal Ros, Vegard Tollefsen, Erik Andrew Johannessen, Agne Johannessen
Publikováno v:
Materials, Vol 16, Iss 6, p 2319 (2023)
AlN is a piezoelectric material used in telecommunication applications due to its high surface acoustic wave (SAW) velocity, stability, and mechanical strength. Its performance is linked to film quality, and one method to achieve high-quality films g
Externí odkaz:
https://doaj.org/article/f8262908b67b40d8977bf5f151e206b7
