Affect on pumping-speed measurements due to variations of test dome design based on Monte Carlo analysis.

Autor: Nesterov, S. B., Vassiliev, Yuri. K., Longsworth, Ralph. C.

Publikováno v: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 2001, Vol. 19 Issue 5, p2287-2293, 7p