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pro vyhledávání: '"Vargas, Mike"'
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Autor:
Purvis, Michael, Fomenkov, Igor V., Schafgans, Alexander A., Vargas, Mike, Rich, Spencer, Tao, Yezheng, Rokitski, Slava I., Mulder, Melchior, Buurman, Erik, Kats, Michael, Stewart, Jayson, LaForge, Andrew D., Rajyaguru, Chirag, Vaschenko, Georgiy, Ershov, Alex I., Rafac, Robert J., Abraham, Mathew, Brandt, David C., Brown, Daniel J.
Publikováno v:
Proceedings of SPIE; 1/11/2018, Vol. 10583, p1-10, 10p
Autor:
Panning, Eric M., Goldberg, Kenneth A., Purvis, Michael A., Schafgans, Alexander, Brown, Daniel J. W., Fomenkov, Igor, Rafac, Rob, Brown, Josh, Tao, Yezheng, Rokitski, Slava, Abraham, Mathew, Vargas, Mike, Rich, Spencer, Taylor, Ted, Brandt, David, Pirati, Alberto, Fisher, Aaron, Scott, Howard, Koniges, Alice, Eder, David, Wilks, Scott, Link, Anthony, Langer, Steven
Publikováno v:
Proceedings of SPIE; March 2016, Vol. 9776 Issue: 1 p97760K-97760K-12, 9678253p
Autor:
Vargas, Mike
Publikováno v:
Contact Quarterly; Winter/Spring2013, Vol. 38 Issue 1, p24-27, 4p
High-power, high-repetition-rate pulsed CO2 lasers and their application in EUV lithography sources.
Autor:
Tao, Yezheng, Schafgans, Alex, Rokitski, Slava, Kats, Michael, Stewart, Jayson, Grava, Jonathan, Das, Palash, Urbanski, Lukasz, Purvis, Mike, Vargas, Mike, Rich, Spencer, Abraham, Mathew, Conklin, Phil, Rafac, Rob, Sandstrom, Rick, Fomenkov, Igor, Brandt, David, Brown, Daniel
Publikováno v:
2016 Conference on Lasers & Electro-Optics (CLEO); 2016, p1-2, 2p
Industrialization of a robust EUV source for high-volume manufacturing and power scaling beyond 250W
Autor:
Goldberg, Kenneth A., Felix, Nelson M., Purvis, Michael, Fomenkov, Igor V., Schafgans, Alexander A., Vargas, Mike, Rich, Spencer, Tao, Yezheng, Rokitski, Slava I., Mulder, Melchior, Buurman, Erik, Kats, Michael, Stewart, Jayson, LaForge, Andrew D., Rajyaguru, Chirag, Vaschenko, Georgiy, Ershov, Alex I., Rafac, Robert J., Abraham, Mathew, Brandt, David C., Brown, Daniel J.
Publikováno v:
Proceedings of SPIE; March 2018, Vol. 10583 Issue: 1 p1058327-1058327-10