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pro vyhledávání: '"Van-Doanh Tran"'
Publikováno v:
Applied Sciences, Vol 11, Iss 13, p 5787 (2021)
The measurement speed and measurement accuracy of a displacement measuring interferometer are key parameters. To verify these parameters, a fast and high-accuracy motion is required. However, the displacement induced by a mechanical actuator generate
Externí odkaz:
https://doaj.org/article/4dfd48e472d546d99933cf31e9db5838
Publikováno v:
Applied Sciences
Volume 11
Issue 13
Applied Sciences, Vol 11, Iss 5787, p 5787 (2021)
Volume 11
Issue 13
Applied Sciences, Vol 11, Iss 5787, p 5787 (2021)
The measurement speed and measurement accuracy of a displacement measuring interferometer are key parameters. To verify these parameters, a fast and high-accuracy motion is required. However, the displacement induced by a mechanical actuator generate