Výsledky vyhledávání - "Van de Laak, R."

Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatus

Autor: Kok, H.V., Kivits, K., Van de Laak, R., Kuiper, J.M., Van der Zouw, G., Tolsma, H.P.T.

Publikováno v: US 7773235 B2

The invention provides a method for determining vibration-related information by projecting an aerial image at an image position in a projection plane, mapping an intensity of the aerial image into an image map, the image map arranged for comprising

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=narcis______::63c82b71a64a1b1f1198bec6d6489284
http://resolver.tudelft.nl/uuid:58f5ac04-d418-448f-8be4-76b47b3fb58a

Zobrazit plný text záznamu

Method and apparatus for vibration detection, method and apparatus for vibration analysis, lithographic apparatus, device manufacturing method, and computer program

Autor: Kok, H.V., Kivits, K., Van de Laak, R., Kuiper, J.M.

Publikováno v: US7308368 B2

A method is provided for determining information relating to vibration. The method includes projecting an aerial image at an image position in a projection plane; mapping an intensity of the aerial image into an image map that contains values of coor

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=narcis______::c20868089a1fa288ecc2316434d98af2
http://resolver.tudelft.nl/uuid:cd5033a6-adf1-4130-8752-61aad5a5ffa6

Zobrazit plný text záznamu

Vyhledávací nástroje:

Upřesnit hledání