Structural study of growth, orientation and defects characteristics in the functional microelectromechanical system material aluminium nitride.

Autor: Hrkac, Viktor, Kobler, Aaron, Marauska, Stephan, Petraru, Adrian, Schürmann, Ulrich, Kiran Chakravadhanula, Venkata Sai, Duppel, Viola, Kohlstedt, Hermann, Wagner, Bernhard, Valeska Lotsch, Bettina, Kübel, Christian, Kienle, Lorenz

Publikováno v: Journal of Applied Physics; 1/7/2015, Vol. 117 Issue 1, p014301-1-014301-8, 8p, 5 Color Photographs, 1 Diagram, 2 Graphs