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pro vyhledávání: '"Valery Felmetsger"'
Autor:
José Manuel Carmona-Cejas, Teona Mirea, Jesús Nieto, Jimena Olivares, Valery Felmetsger, Marta Clement
Publikováno v:
Materials, Vol 16, Iss 6, p 2169 (2023)
This work presents a study on the homogeneity and thermal stability of Al0.7Sc0.3N films sputtered from Al-Sc segmented targets. The films are sputtered on Si substrates to assess their structural properties and on SiO2/Mo-based stacked acoustic mirr
Externí odkaz:
https://doaj.org/article/f2aead146ac44581ae8ff554e40eee8b
Publikováno v:
2022 IEEE International Ultrasonics Symposium (IUS).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d89941e7da571f4c723402149e92b70d
https://doi.org/10.1109/ius54386.2022.9957694
https://doi.org/10.1109/ius54386.2022.9957694