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pro vyhledávání: '"Valeriy Pavlovich Krivobokov"'
Autor:
Alena Olegovna Borduleva, Galina Alekseevna Bleykher, Dmitrii Vladimirovich Sidelev, Valeriy Pavlovich Krivobokov
Publikováno v:
Acta Polytechnica, Vol 56, Iss 6, Pp 425-431 (2016)
This work focuses on erosion and thermal processes taking place on the surface of the titanium target in magnetron sputtering. The study was carried out using magnetron sputtering systems (MSS) with different thermal insulation target types from the
Externí odkaz:
https://doaj.org/article/9a4e3ad64d3e47b2a4605edb72b49a8e
