Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Valérie Paret"'
Autor:
Pierre Boher, Magali Putero-Vuaroqueaux, Bernard Vidal, Roland Geyl, Etienne Quesnel, Jean Yves Robic, Valérie Paret
Publikováno v:
Microelectronic Engineering
Microelectronic Engineering, Elsevier, 2002, 61-62 (1-3), pp.145-155. ⟨10.1016/S0167-9317(02)00576-2⟩
Microelectronic Engineering, 2002, 61-62 (1-3), pp.145-155. ⟨10.1016/S0167-9317(02)00576-2⟩
Microelectronic Engineering, Elsevier, 2002, 61-62 (1-3), pp.145-155. ⟨10.1016/S0167-9317(02)00576-2⟩
Microelectronic Engineering, 2002, 61-62 (1-3), pp.145-155. ⟨10.1016/S0167-9317(02)00576-2⟩
In the frame of the French EUV program PREUVE, different studies are made on different key aspects of EUV lithography. Aspheric optics are fabricated for the exposure test bench as well as mask blanks. All these objects require Mo/Si multilayer coati
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::511fc84f3d71c98f3ec102814307e0f2
https://doi.org/10.1016/s0167-9317(02)00576-2
https://doi.org/10.1016/s0167-9317(02)00576-2
Autor:
Valérie Paret, M.L. Theye
Publikováno v:
Carbon. 40:1153-1166
Hydrogenated amorphous carbon (a-C:H) films prepared by plasma decomposition of hydrocarbons exhibit a wide variety of electronic and mechanical properties depending on their deposition conditions, which makes them very interesting for applications i
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5c52e9dfb12dfb1c7a6c7dcd5f2771a0
https://doi.org/10.1016/s0008-6223(01)00291-3
https://doi.org/10.1016/s0008-6223(01)00291-3
Autor:
Valérie Paret, M.L. Theye
Publikováno v:
Journal of Non-Crystalline Solids. :750-754
The presence of both sp 2 and sp 3 hybridized carbon atoms, together with the tendency of sp 2 atoms to gather into π-bonded clusters with different bonding configurations, induce a particular type of disorder in hydrogenated amorphous carbon (a-C:H
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bd51ab13b635fca76ffe1e905d4a9568
https://doi.org/10.1016/s0022-3093(99)00951-5
https://doi.org/10.1016/s0022-3093(99)00951-5
Autor:
Bernard Vidal, Martin Schmidt, Remy Marmoret, Christophe Cachoncille, Pierre Boher, Valérie Paret, Jean Jacques Ferme, Jean Marie Barbiche, Jean-Yves Robic, Roland Geyl
Publikováno v:
SPIE Proceedings.
PREUVE is the French federative program aimed at developing knowledge concerning the critical issues of EUV Lithography. The project supported by the French ministry of industry is one of the most important project in the field of nano-technologies i
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5e6615d111269aed0a87c490bc63f610
https://doi.org/10.1117/12.504564
https://doi.org/10.1117/12.504564