Real-time air refractive index compensation of laser interferometer system for step gauge calibration with CMM technique.

Autor: Vacharanukul, Ketsaya, Sudatham, Wiroj, Tonmueanwai, Anusorn

Publikováno v: 2011 International Quantum Electronics Conference (IQEC) & Conference on Lasers & Electro-Optics (CLEO) Pacific Rim incorporating the Australasian Conference on Optics, Lasers & Spectroscopy & the Australian Conference on Optical Fibre Technology; 1/ 1/2011, p1978-1980, 3p