Zobrazeno 1 - 5
of 5
pro vyhledávání: '"V.J. Malakhov"'
Autor:
V.J. Malakhov, A. O. Kozak, O. S. Lytvyn, O. K. Sinelnichenko, L.A. Ivashchenko, Volodymyr Ivashchenko, O. K. Porada, Tamara Tomila
Publikováno v:
Thin Solid Films. 569:57-63
Silicon carbon nitride (SiCN) thin films were deposited by plasma-enhanced chemical vapor deposition using hexamethyldisilazane at different nitrogen flow rates. Films were investigated by an atomic force microscope, X-ray diffraction spectroscopy, F
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::991a725b09c89e690e8c7080259ba32f
https://doi.org/10.1016/j.tsf.2014.08.027
https://doi.org/10.1016/j.tsf.2014.08.027
Akademický článek
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Autor:
Aysegul Abdelal, Peter Mascher
Publikováno v:
ECS Meeting Abstracts. :874-874
Silicon carbon nitride (SiCN) ternary compounds present remarkable mechanical strength, bandgap tunability, optical responsivity in the UV region, and dielectric performance in microelectronics due to the combined features of silicon nitride (SiN), s
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bf47c7905ef0e0d6eb8564e335b986db
https://doi.org/10.1149/ma2022-0218874mtgabs
https://doi.org/10.1149/ma2022-0218874mtgabs
Autor:
Aysegul Abdelal, Peter Mascher
Publikováno v:
ECS Meeting Abstracts. :859-859
Silicon carbonitride (SiCN) thin films have drawn considerable interest among the ternary compounds due to the combination of unique properties such as high hardness, wide band gap, high photosensitivity in the ultraviolet (UV) region and low dielect
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d0ce71a7ec46f8c6528f4649215d2cbe
https://doi.org/10.1149/ma2021-0121859mtgabs
https://doi.org/10.1149/ma2021-0121859mtgabs
This book presents the findings of experimental and theoretical (including first-principles molecular dynamics simulation) studies of nanostructured and nanocomposite metal-based materials, and nanoscale multilayer coatings fabricated by physical or
