Zobrazeno 1 - 1
of 1
pro vyhledávání: '"V. V. Troshkov"'
Publikováno v:
Technical Physics Letters. 28:173-175
The possibility of obtaining Ta2O5 films with homogeneous properties on the surface of substrates possessing complicated shapes was studied. In the deposition systems employing point molecular sources of a vapor flow, the problem is solved by using v
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6e070f634a3e68b12d123ae4c83034cd
https://doi.org/10.1134/1.1467265
https://doi.org/10.1134/1.1467265
