Zobrazeno 1 - 3
of 3
pro vyhledávání: '"V. V. Shkurkin"'
Publikováno v:
Technical Physics. 47:760-766
A model of silane decomposition in a radio-frequency argon plasma is constructed. The concentrations of SiH4 decomposition products, as well as products of synthesis (higher silanes), are calculated. The role of metastable argon atoms in the formatio
Publikováno v:
Technical Physics. 49:502-504
The electron energy distribution function in an RF low-pressure plasma is found in the presence of dust particles. The effect of microscopic objects on the electroneutrality of the plasma and the electron energy distribution is estimated.
Autor:
V. N. Sergeev, I. A. Tikhomirov, V. V. Tikhomirov, V. I. Shishkovskii, V. V. Shkurkin, A. A. Solov'ev
Publikováno v:
Soviet Physics Journal. 17:462-464
This paper considers the question concerning the applicability of the well-known theory of positive column contraction of a direct current discharge to a high-frequency discharge in nitrogen at reduced pressures. Measurements of the electron energy d