Zobrazeno 1 - 3
of 3
pro vyhledávání: '"V. V. Schinkarenko"'
Autor:
O. B. Okhrimenko, D. Virovska, O. S. Lytvym, R. V. Konakova, J. Koprinarova, Elena Atanassova, V. V. Schinkarenko, Vadym Fedorovych Mitin
Publikováno v:
Microelectronics Reliability. 45:123-135
The paper presents results of the effect of microwave irradiation at room temperature on the properties of thin layers of tantalum pentoxide deposited on Si by rf sputtering. Electrical characterization is performed in conjunction with Auger electron
Publikováno v:
Semiconductor Science and Technology. 23:035004
The effect of microwave radiation at room temperature on the characteristics of Ta2O5 (7–25 nm)-based capacitors with various gates (Al, W, TiN) has been investigated. The variation of the parameters upon treatment is a function of the initial prop
Publikováno v:
Semiconductor Science & Technology; Mar2008, Vol. 23 Issue 3, p35004-35004, 1p