Zobrazeno 1 - 1
of 1
pro vyhledávání: '"V. S. Protopopova"'
Publikováno v:
AIP Advances, Vol 4, Iss 10, Pp 107130-107130-14 (2014)
This paper presents the results from an experimental study of the ion flux characteristics behind the remote plasma zone in a vertical tube reaction chamber for atmospheric pressure plasma enhanced chemical vapor deposition. Capacitively coupled radi
Externí odkaz:
https://doaj.org/article/42f5a55d534c4634a7d46dbe8d6c5cbf
