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Publikováno v:
Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering. 23:134-141
The problems of increasing the reliability of microelectromechanical systems are considered on the example of an automobile voltage regulator. A model of the process is proposed and a study of the effect of temperature on the formation of stress fiel