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pro vyhledávání: '"V. I. Ukhin"'
Autor:
M. V. Ryabtseva, E. E. Grinberg, V. I. Ukhin, I. E. Strel’nikova, Yu. I. Levin, V. I. Rakhlin
Publikováno v:
Russian Journal of Applied Chemistry. 84:1909-1913
We considered a deep cleaning of 1,1,1,3,3,3-hexamethyldisilazane used in microelectronics and organoelement synthesis from a series of homogeneous and heterogeneous admixtures by various physicochemical methods.