Zobrazeno 1 - 1
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pro vyhledávání: '"V. I. Berezenko"'
Publikováno v:
Russian Journal of Applied Chemistry. 91:1255-1261
Process for deep plasma-chemical etching of single-crystal quartz plates in a SF6/O2 gas mixture was developed. The method of scientific experiment design based on the Taguchi matrix technique was used to rank basic technological parameters (bias vol
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d8cc1b356d7f2d3a2ea7a185441593db
https://doi.org/10.1134/s1070427218080025
https://doi.org/10.1134/s1070427218080025
